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80mm,定位精度1μm。 A macro-micro dual-drive ultra-precision positioning mechanism based on machine vision was presented. Combining macro with micro actuator, a system with large workspace and high resolution of motion was researched. The macro motion was driven by the motor, and PZT-drive micro stage with high frequency has been installed on the motor and compensated the position error. The micro-vision has been integrated into the closed-loop feedback, which was used to measure the position and motion the end-executive facility, was installed on the micro-platform. At the same time motion control method was adopted, which based on motion programming and motion estimation and it improved system motion speed. The experiment results showed that the travel stage was 80mm, the repeatability positioning precision was 1μm.