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壓電驅(qū)動微懸臂梁與基底粗糙面間多次接觸分析
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國家自然科學(xué)基金資助項目(51205062)和福建省自然科學(xué)基金資助項目(2011J01299)


Multiple-contact Analysis between Microcantilever and Substrate Rough Surface Driven by Piezoelectric
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    摘要:

    基于壓電原理,在考慮黏著、微凸體間相互作用、基底彈塑性變形及微懸臂梁彈性恢復(fù)等基礎(chǔ)上,運用ABAQUS動態(tài)模擬分析了壓電薄膜驅(qū)動下微懸臂梁末端與基底粗糙面間的接觸。結(jié)果表明:每次壓電驅(qū)動接觸過程中均存在數(shù)次明顯的接觸-分離情形,梁與基底在無電壓作用后2~4μs內(nèi)仍出現(xiàn)黏合,分離期間粗糙表面發(fā)生小部分的彈塑性變形,其中最大殘余應(yīng)力值處于接觸區(qū)域邊緣;隨著壓電驅(qū)動次數(shù)的增加,基底發(fā)生塑性變形區(qū)域不斷向兩邊擴展,表面間黏合作用增強,影響系統(tǒng)接觸的可靠性。

    Abstract:

    Based on the piezoelectric principle, in consideration of adhesion, interaction between asperities, elastic-plastic deformation of the substrate, microcantilever elastic recovery and so on, the dynamic characteristics between microcantilever and the substrate rough surface driven by piezoelectric were simulated by using ABAQUS finite element software. The results showed that there were several significant contactseparation cases during the contact process of each piezoelectric driving. When no voltage was applied for 2~4μs, bonding between beam and the substrate still appeared. A small portion of the elasticplastic deformation on the rough surface occurred during separation, and the maximum residual stress appeared at the edge of the contact area. With the increase of piezoelectric driving times, the effect of surface bonding enhanced and the plastic deformation region on the substrate rough surface extended to two sides continuously, which influenced the reliability of the contact system.

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黃健萌,黃 靖.壓電驅(qū)動微懸臂梁與基底粗糙面間多次接觸分析[J].農(nóng)業(yè)機械學(xué)報,2015,46(9):368-372. Huang Jianmeng, Huang Jing. Multiple-contact Analysis between Microcantilever and Substrate Rough Surface Driven by Piezoelectric[J]. Transactions of the Chinese Society for Agricultural Machinery,2015,46(9):368-372.

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  • 收稿日期:2014-12-10
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  • 在線發(fā)布日期: 2015-09-10
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